With version STM32CubeProgrammer 2.16 I can't program the .elf file.
The real problem is that with the latest STM32CubeIDE 1.15.0 it is not possible to debug.
With version STM32CubeProgrammer 2.13 I can program the .elf file.
To debug from STM32CubeIDE 1.15.0 I must therefore program *.elf with STM32CubeProgrammer 2.13 and remove the download phase from the debugger configuration.
It's a similar problem to the one in this post STM32CubeProgrammer Failure.
The file STM32_Prog_DB_0x415.xml has been released by @Aziz BRIGUI as a workaround and the Internal ticket 172951 has been opened:
It is possible to have a similar fix for the STM32G473VBTX
