I'm looking for a mems or IMU sensor solution can be measured X. Y, Z axis tilt within 0.05 degree repeatability.

[Eleon BORLINI · Accepted solution]

Hi @HKita.1​ ,

ST portfolio offers some solution for the tilt measures, in particular the class of the inclinometers (IIS2ICLX, IIS3DHHC, ISM330DHCX).

I suggest you to have a look to the Precise and accurate tilt sensing in industrial applications - AN5551 Application note

Your specific requirement is a bit strict, but basically depends upon how good is the calibration of your device (that should be performed at the beginning of the tests), and the underlying acceleration noise. Supposing the device are well calibrated, and the environmental noise is 0.5mg, the accuracy (and repeatability) of the tilt measure should match your requirements up to 50/60 deg.

But if the noise level is higher, you should try to improve it by averaging the output over n samples.

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-Eleon