The sensor has air in it. But there is a hole - otherwise it would explode during reflow. But the datasheet says a slow ramp up is required to allow time for the air pressure to escape.
So the vacuum is not the problem but a rapid change in air pressure would be.
The resolution is 1mm. However the accuracy is more like +/- 3%. And maybe +/- a 5mm below 2cm.
The working temperature is stated in the datasheet - -20 to +70 degrees C.
If you need higher temps and better short distance linearity, just wait. It's almost out.
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