on 2026-04-01 7:25 AM
Are you wondering how pressure sensors work in your application? Do you want to get more information about the type of pressure measurement or level of integration needed?
This knowledge article provides details of how pressure measurement is done in STMicroelectronics MEMS sensors.
Figure 1 illustrates the physical internal structure of a pressure sensor. To help you understand how pressure sensors and pressure measurement work, it is a cross-section of a standard pressure sensor.
Figure 1: Internal structure of a pressure sensor (cross-section).
In figure 1, the positions of ports P1 and P2 are indicated. The importance of these ports and their positions for pressure measurement is explained in the following sections.
The die and wire bonds are protected with silicone gel. This gel can be damaged, leaving the die and wire bonds exposed to the media, if the sensor is used with media other than dry, clean air.
Pressure measurements are divided into three categories: absolute pressure, gage (gauge) pressure, and differential pressure, as described in the next sections.
The relationship between absolute pressure, gage pressure, and vacuum is shown in figure 2.
Figure 2: Relationship between absolute pressure, gage pressure, and vacuum.
Figure 3: Absolute pressure
Figure 5: Differential pressure.
Pressure sensors are also categorized by level of integration. Three different categories can be mentioned:
Figure 6: Uncompensated pressure sensors.
Figure 7: Compensated pressure sensors.
Figure 8: Integrated pressure sensors.
In addition to the types mentioned above, digital output pressure sensors are available. These sensors integrate an ADC inside the signal chain, such that the pressure value is directly available in sensor registers, accessible by an MCU.
In terms of communication, different protocols are supported: SPI, I²C, PSI5, DIS3. The last two types of communication are commonly used for airbag sensors.
The article has shown different pressure measurements and types of integration of pressure sensors.
A product selector allows you to explore the different MEMS pressure sensors from STMicroelectronics:
Now, it is your turn, choose your pressure sensor and start designing a new breakthrough application!