Are MEMS microphones resistant to vibration? Can they be used in harsh environments?

[Pasi MYLLYMAKI]

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[Vladimir JANOUSEK_2365]

The internal micro structures are designed in the way to limit the vibration impacts by silicon springs approach. The topic is quite complex of course to explain. ST has specific technology to address this problematic. Since a microphone has inlet which is open to environment, usually customers in their application are protecting the mic by a mesh or specific dust or water proof material.